High durability beryllium-based membrane for EUV pellicles
High durability beryllium-based membrane for EUV pellicles
2 months ago
spiedigitallibrary.org
Our EUV pellicles are 20 times thinner than the membrane of a soap bubble. In our lithography machines, the pellicle prevents particles from contaminating the mask that contains the pattern to be printed on the chip. The pellicle catches the particles and keeps them 'out of focus', while still letting through extreme ultraviolet (EUV) light. | ASML
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